Polycrystals growth on dielectric masks during InP/GaAs selective MOVPE

Selective-area low-pressure MOCVD of GaInAsP and related materials on planar InP substrates

M.A. Gibbon, J. P. Stagg, C.G. Cureton et al. · Semiconductor Science and Technology · 1993 · 152 citations

Engineering, Materials Engineering, Materials Science +14

Surface Reaction Kinetics in Metalorganic Vapor Phase Epitaxy of GaAs through Analyses of Growth Rate Profile in Wide-Gap Selective-Area Growth

Ho-jin Oh, Masakazu Sugiyama, Yoshiaki Nakano et al. · Japanese Journal of Applied Physics · 2003 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface migration and reaction mechanism during selective growth of GaAs and AlAs by metalorganic chemical vapor deposition

Kenji Hiruma, Toru Haga, M. Miyazaki · Journal of Crystal Growth · 1990 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface-diffusion model in selective metalorganic chemical vapor deposition

Koichi Yamaguchi, Masaaki Ogasawara, Kotaro Okamoto · Journal of Applied Physics · 1992 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17