Publication | Closed Access
Effects of substrate surface preparation on chemical vapor deposition growth of 4H-SiC epitaxial layers
42
Citations
10
References
2001
Year
Materials ScienceSubstrate Surface PreparationEngineering4H-sic Epitaxial LayersSurface ScienceApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxyEpitaxial GrowthChemical Vapor DepositionCarbide
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