Concepedia

Effects of the buffer layer in metalorganic vapour phase epitaxy of GaN on sapphire substrate

Hiroshi Amano, Isamu Akasaki, Kazumasa Hiramatsu, Norikatsu Koide, Nobuhiko Sawaki

Thin Solid Films · 1988 · 268 citations · 1 references

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1

Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer

Hiroshi Amano, Nobuhiko Sawaki, Isamu Akasaki et al. · Applied Physics Letters · 1986 · 2.2K citations

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