Surface cleaning and etching of CdZnTe and CdTe in H2/Ar, CH4/H2/Ar, and CH4/H2/N2/Ar electron cyclotron resonance plasmas

Atomic subshell photoionization cross sections and asymmetry parameters: 1 ⩽ Z ⩽ 103

J. J. Yeh, I. Lindau · Atomic Data and Nuclear Data Tables · 1985 · 4.9K citations

Natural Sciences, Physics, Atomic Physics +2

Optical properties of thin films

D. E. Aspnes · Thin Solid Films · 1982 · 1.6K citations

Natural Sciences, Materials Science, Physics +14

Substrate chemical etching prior to molecular-beam epitaxy: An x-ray photoelectron spectroscopy study of GaAs {001} surfaces etched by the H2SO4-H2O2-H2O solution

J. Massies, J. P. Contour · Journal of Applied Physics · 1985 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +17

GaAs cleaning with a hydrogen radical beam gun in an ultrahigh-vacuum system

Sumio Sugata, A. Takamori, N. Takado et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 86 citations

Engineering, Materials Engineering, Materials Science +17

Surface composition changes in GaAs due to low-energy ion bombardment

I. L. Singer, J. S. Murday, L.R. Cooper · Surface Science · 1981 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +14