Microsystem Technologies · 2015 · 21 citations · 22 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSensorsMems FabricationMems PackagingMems SensorsMetal Oxide NanomaterialsMicroelectromechanical SensorsSensor MaterialsComposite Sensor MaterialsGas Sensing Using Metal Oxide NanomaterialsMems Device PackagingMetal Oxide Sensor MaterialsSensor Packaging
22