Concepedia

Stoichiometry of tantalum oxide films prepared by KrF excimer laser-induced chemical vapor deposition

Y. Imai, Akio Watanabe, Masakazu Mukaida, Kazuo Osato, Tatsuo Tsunoda, Tetsuya Kameyama, Kenzo Fukuda

Thin Solid Films · 1995 · 41 citations · 12 references

DOI

Concepts

References

12

Core electron binding energies in some Group IIIA, VB, and VIB compounds

George McGuire, G.K. Schweitzer, Thomas A. Carlson · Inorganic Chemistry · 1973 · 471 citations

, , +8

Two-photon processes in defect formation by excimer lasers in synthetic silica glass

Kazuo Arai, Hiroaki Imai, Hideo Hosono et al. · Applied Physics Letters · 1988 · 165 citations

, , +15

Conduction Mechanism of Leakage Current in Ta2 O 5 Films on Si Prepared by LPCVD

Shigeaki Zaima, Takeshi Furuta, Yasuo Koide et al. · Journal of The Electrochemical Society · 1990 · 86 citations

, , +17

Leakage‐Current Increase in Amorphous Ta2 O 5 Films Due to Pinhole Growth during Annealing Below 600°C

Shin’ichiro Kimura, Yasushiro Nishioka, Akira Shintani et al. · Journal of The Electrochemical Society · 1983 · 81 citations

, , +16

On The Defect Structure of Ta[sub 2]O[sub 5]

Per Kofstad · Journal of The Electrochemical Society · 1962 · 76 citations

, , +17