Concepedia

Publication | Closed Access

Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique

DOI

159

Citations

7

References

2001

Year

Li‐Anne Liew, Wenge Zhang, Victor M. Bright, Linan An, Martin L. Dunn, Rishi Raj
Sensors and Actuators A Physical

References

YearCitations

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