Publication | Closed Access
Effect of reactive magnetron sputtering parameters on structural and electrical properties of hafnium oxide thin films
27
Citations
20
References
2014
Year
Materials EngineeringMagnetismMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsElectrical PropertiesReactive MagnetronThin Film Processing
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