Concepedia

Jane P. Chang

JP

117

Publications

6.9K

Citations

46

H-Index

1962

Active since

Affiliations

University of California, Los Angeles(Current)

Stanford Synchrotron Radiation Lightsource

Sandia National Laboratories

SLAC National Accelerator Laboratory

Uppsala University

Jane P. Chang is an author at University of California, Los Angeles specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemistryThin FilmsChemical EngineeringElectrical EngineeringMicroelectronicsNanotechnology

Publications per year

1962–2024

117

Publications

117

Development of hafnium based high-k materials—A review

Ju Hyeon Choi, Yuanbing Mao, Jane P. Chang · Materials Science and Engineering R Reports · 2011 · 568 citations

Materials Science, Materials Engineering, High Temperature Materials +5

Infrared spectroscopic analysis of the Si/SiO2 interface structure of thermally oxidized silicon

K. T. Queeney, M. K. Weldon, Jane P. Chang et al. · Journal of Applied Physics · 2000 · 257 citations

Materials Science, Engineering, Physics +13

Dielectric property and thermal stability of HfO2 on silicon

Yi Lin, Ragesh Puthenkovilakam, Jane P. Chang · Applied Physics Letters · 2002 · 241 citations

Materials Science, Hafnium Oxide, Electrical Engineering +14

Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC

Carey M. Tanner, Ya-Chuan Perng, Christopher L. Frewin et al. · Applied Physics Letters · 2007 · 171 citations

Engineering, Al2o3∕4h-sic Barrier Height, Electrical Performance +19

Kinetic study of low energy ion-enhanced polysilicon etching using Cl, Cl2, and Cl+ beam scattering

Jane P. Chang, Herbert H. Sawin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 146 citations

Engineering, Electron-beam Lithography, Cl+ Beam Scattering +17

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