The deposition of low temperature sputtered In2O3 films using pulsed d.c magnetron sputtering from a powder target - Concepedia

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The deposition of low temperature sputtered In2O3 films using pulsed d.c magnetron sputtering from a powder target

DOI Full Paper Access

25

Citations

29

References

2013

Year

Sreejith Karthikeyan, Arthur E. Hill, Richard D. Pilkington

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsPulsed D.c MagnetronPulsed Laser DepositionThin FilmsIn2o3 FilmsChemical DepositionThin Film ProcessingLow Temperature

References

	Year	Citations

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