Development of wire spraying for direct micro-patterning via an atmospheric-pressure UHF inductively coupled microplasma jet

A dc Microplasma on a Chip Employed as an Optical Emission Detector for Gas Chromatography

Jan C. T. Eijkel, Herbert Stoeri, A. Manz · Analytical Chemistry · 2000 · 155 citations

Natural Sciences, Chemistry, Analytical Chemistry +15

Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets

Takanori Ichiki, Ryo Taura, Yasuhiro Horiike · Journal of Applied Physics · 2003 · 152 citations

Natural Sciences, Electrical Engineering, Physics +16

Microdischarge devices fabricated in silicon

J. W. Frame, D. J. Wheeler, T. A. DeTemple et al. · Applied Physics Letters · 1997 · 136 citations

Natural Sciences, Materials Science, Physics +13

Hollow cathode sustained plasma microjets: Characterization and application to diamond deposition

R. Mohan Sankaran, Konstantinos P. Giapis · Journal of Applied Physics · 2002 · 122 citations · Full text

Natural Sciences, Materials Science, Physics +16

Emission of excimer radiation from direct current, high-pressure hollow cathode discharges

A. El-Habachi, Karl H. Schoenbach · Applied Physics Letters · 1998 · 118 citations · Full text

Natural Sciences, Electrical Engineering, Physics +12