Concepedia

Ryo Taura

RT

Statistics

Publications

1

Citations

152

H-Index

1

Active since

2003

Affiliations

Toyo University(Current)

Ryo Taura is an author at Toyo University specializing in plasma etching, silicon wafers, and etching.

Publications per year

2003–2003

1

Publications

1

Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets

Takanori Ichiki, Ryo Taura, Yasuhiro Horiike · Journal of Applied Physics · 2003 · 152 citations

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