H2 dilution effect in the Cat-CVD processes of the SiH4/NH3 system

Vacuum ultraviolet absorption cross sections of SiH4, GeH4, Si2H6, and Si3H8

Uichi Itoh, Yasutake Toyoshima, Hideo Onuki et al. · The Journal of Chemical Physics · 1986 · 300 citations

Natural Sciences, Chemistry, Physics +17

Growth mechanism of microcrystalline silicon obtained from reactive plasmas

Akihisa Matsuda · Thin Solid Films · 1999 · 295 citations

Natural Sciences, Materials Engineering, Materials Science +12

Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

Hironobu Umemoto, Kentaro Ohara, Daisuke Morita et al. · Journal of Applied Physics · 2002 · 159 citations · Full text

Natural Sciences, Chemical Engineering, Chemistry +12

Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy

Yoshitaka Nozaki, Koichi Kongo, T. Miyazaki et al. · Journal of Applied Physics · 2000 · 93 citations · Full text

Natural Sciences, Chemistry, Materials Science +15

Summary of research in NEDO Cat-CVD project in Japan

Hideki Matsumura · Thin Solid Films · 2001 · 93 citations

Natural Sciences, Animal Sciences, Production Medicine +1