Growth mechanism of microcrystalline silicon obtained from reactive plasmas

Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma

Akihisa Matsuda · Journal of Non-Crystalline Solids · 1983 · 646 citations

Natural Sciences, Materials Engineering, Materials Science +14

A thermodynamic criterion of the crystalline-to-amorphous transition in silicon

S. Vepřek, Zafar Iqbal, F.-A. Sarott · Philosophical Magazine B · 1982 · 289 citations

Natural Sciences, Materials Engineering, Materials Science +17

Control of silicon network structure in plasma deposition

C. C. Tsai, G. B. Anderson, R. Thompson et al. · Journal of Non-Crystalline Solids · 1989 · 246 citations

Engineering, Materials Engineering, Materials Science +13

Roles of Atomic Hydrogen in Chemical Annealing

Kenjiro Nakamura, K. Yoshino, Shinya Takeoka et al. · Japanese Journal of Applied Physics · 1995 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of Surface and Growth-Zone Reactions in the Formation Process of µc-Si:H

Akihisa Matsuda, Toshio Goto · MRS Proceedings · 1989 · 84 citations

Natural Sciences, Materials Engineering, Materials Science +14