Koji Yoneyama

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Active since

2005

Affiliations

Japan Advanced Institute of Science and Technology(Current)

Canon Anelva (Japan)

Koji Yoneyama is an author at Japan Advanced Institute of Science and Technology specializing in natural sciences, materials science, and surface science.

Publications per year

2005–2006

Publications

Quantification of Gas-Phase H-Atom Number Density by Tungsten Phosphate Glass

Hironobu Umemoto, Koji Yoneyama, Atsushi Masuda et al. · Japanese Journal of Applied Physics · 2005 · 30 citations

Natural Sciences, Materials Science, Physics +13

Technique for the production, preservation, and transportation of H atoms in metal chambers for processings

S. G. Ansari, Hironobu Umemoto, Takashi Morimoto et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +12

H2 dilution effect in the Cat-CVD processes of the SiH4/NH3 system

S. G. Ansari, Hironobu Umemoto, Takashi Morimoto et al. · Thin Solid Films · 2005 · 20 citations

Natural Sciences, Chemical Engineering, Chemistry +5

Mass-Spectrometric Studies of Catalytic Chemical Vapor Deposition Processes of Organic Silicon Compounds Containing Nitrogen

Takashi Morimoto, S. G. Ansari, Koji Yoneyama et al. · Japanese Journal of Applied Physics · 2006 · 19 citations

Natural Sciences, Chemistry, Materials Science +15

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