Precision Engineering · 1990 · 141 citations · 5 references
EngineeringManufacturing EngineeringMechanical EngineeringActuatorsMechatronicsMicrofabricationActuator IntegrationMachiningMicromachiningPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsMicro-positioning SystemsMicroelectromechanical ActuatorsMicropositioning SystemsMiniature Positioning StagesPiezoelectric Properties
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