Design and testing of a fast tool servo for diamond turning

Piezodriven 50-μm range stage with subnanometer resolution

Fredric Scire, E. Clayton Teague · Review of Scientific Instruments · 1978 · 183 citations · Full text

Engineering, Materials Science, Mechanical Engineering +13

<title>Design And Construction Of A Large, Vertical Axis Diamond Turning Machine</title>

R. R. Donaldson, S. R. Patterson · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1983 · 101 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +10

The application of capacitance micrometry to the control of Fabry-Perot etalons

T. R. Hicks, N. K. Reay, P. D. Atherton · Journal of Physics E Scientific Instruments · 1984 · 62 citations

Engineering, Electrical Engineering, Instrumentation +11

A stable, rugged, capacitance-stabilised piezoelectric scanned Fabry-Perot etalon

D. Rees, I. McWhirter, P. B. Hays et al. · Journal of Physics E Scientific Instruments · 1981 · 31 citations

Engineering, Aerospace Engineering, Electrical Engineering +15

<title>The Motion Control System For The Large Optics Diamond Turning Machine (LODTM)</title>

Howard K. McCue · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1983 · 17 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16