Magnetron sputter deposition: Linking discharge voltage with target properties

Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons

A. V. Phelps, Zoran Petrović · Plasma Sources Science and Technology · 1999 · 891 citations

Natural Sciences, Materials Science, Electronic Materials +15

Fundamental understanding and modeling of reactive sputtering processes

S. Berg, Tomas Nyberg · Thin Solid Films · 2005 · 699 citations

Engineering, Materials Engineering, Materials Science +10

Phonon related properties of transition metals, their carbides, and nitrides: A first-principles study

É. I. Isaev, S. I. Simak, Igor A. Abrikosov et al. · Journal of Applied Physics · 2007 · 367 citations · Full text

Natural Sciences, Materials Science, Physics +17

Magnetron sputtering: basic physics and application to cylindrical magnetrons

John A. Thornton · Journal of Vacuum Science and Technology · 1978 · 361 citations

Natural Sciences, Electrical Engineering, Physics +10

Ion-induced electron emission from clean metals

R. A. Baragiola, E. Vereda Alonso, J. Ferrón et al. · Surface Science · 1979 · 279 citations

Natural Sciences, Materials Engineering, Materials Science +8