Concepedia

A New Method for Extracting Interface Trap Density in Short-Channel MOSFETs from Substrate-Bias-Dependent Subthreshold Slopes

ETRI Journal · 1993 · 14 citations · 0 references

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Concepts

EngineeringComputer EngineeringElectrical EngineeringInterface ScienceMicroelectronicsSemiconductor DevicesDevice ModelingDevice SimulationIntegrated Circuit DesignMetal-oxide-semiconductor Field-effect TransistorsSemiconductor InterfacesShort-channel EffectsGate Oxide Thickness EffectsInterface DensityInterface Trap DensityInterface Trap Density MeasurementInterface Trap ModelingSource-drain LeakageSubthreshold Slope Engineering