Fabrication of concave micro lens array using laser patterning and isotropic etching

Technique for monolithic fabrication of microlens arrays

Zoran D. Popović, Robert A. Sprague, G. A. N. Connell · Applied Optics · 1988 · 511 citations

Engineering, Manufacturing Engineering, Materials Science +13

Design, fabrication and testing of microlens arrays for sensors and microsystems

Ph. Nussbaum, R. Völkel, Hans Peter Herzig et al. · Pure and Applied Optics Journal of the European Optical Society Part A · 1997 · 398 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Hexagonal microlens array modeling and fabrication using a thermal reflow process

Che-Ping Lin, Hsiharng Yang, Ching‐Kong Chao · Journal of Micromechanics and Microengineering · 2003 · 117 citations

Engineering, Materials Engineering, Materials Science +14

Microlenses and microlens arrays formed on a glass plate by use of a CO_2 laser

Moriaki Wakaki, Yuichi Komachi, G. Kanai · Applied Optics · 1998 · 90 citations

Engineering, Materials Engineering, Materials Science +13

Metal film removal and patterning using a XeCl laser

James E. Andrew, P. E. Dyer, R.D. Greenough et al. · Applied Physics Letters · 1983 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +15