Microlenses and microlens arrays formed on a glass plate by use of a CO_2 laser

Abstract

Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO(2) laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO(2) laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a light source. The focused spot FWHM diameter of 1.35 mum was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized.