A design tool for pressure microsensors based on FEM simulations

MOS Integrated silicon pressure sensor

Hiroshi Tanigawa, Tohru Ishihara, M. Hirata et al. · IEEE Transactions on Electron Devices · 1985 · 51 citations

Engineering, Electrical Engineering, Microelectronics +16

Nonlinear analysis of a CMOS integrated silicon pressure sensor

Kenichiro Suzuki, Tohru Ishihara, M. Hirata et al. · IEEE Transactions on Electron Devices · 1987 · 35 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A simulation tool for mechanical sensor design

B. Folkmer, H.L. Offereins, H. Sandmaier et al. · Sensors and Actuators A Physical · 1992 · 12 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14

Mechanical analysis of polycrystalline and single-crystalline silicon microstructures

András Kovács, A Stoffel · Sensors and Actuators A Physical · 1994 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +14