M. Hirata

CMOS integrated silicon pressure sensor

Tohru Ishihara, Kenichiro Suzuki, S. Suwazono et al. · IEEE Journal of Solid-State Circuits · 1987 · 73 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Plasma polymerization of organosilicon compounds

N. Inagaki, Shuji Kondo, M. Hirata et al. · Journal of Applied Polymer Science · 1985 · 71 citations

Natural Sciences, Chemistry, Materials Science +16

MOS Integrated silicon pressure sensor

Hiroshi Tanigawa, Tohru Ishihara, M. Hirata et al. · IEEE Transactions on Electron Devices · 1985 · 51 citations

Engineering, Electrical Engineering, Microelectronics +16

Myocardial energy metabolism in the hypertrophied hearts of spontaneously hypertensive rats

Norio Shimamoto, Noriko Goto, Masao J. Tanabe et al. · Basic Research in Cardiology · 1982 · 38 citations

Life Sciences, Cardiology, Physiology +16

Nonlinear analysis of a CMOS integrated silicon pressure sensor

Kenichiro Suzuki, Tohru Ishihara, M. Hirata et al. · IEEE Transactions on Electron Devices · 1987 · 35 citations

Engineering, Electrical Engineering, Mechanical Engineering +17