Statistics
Publications
18
Citations
498
H-Index
13
Active since
1971
Affiliations
NEC (Japan)(Current)
M. Hirata is an author at NEC (Japan) specializing in engineering, microelectronics, and medicine.
Publications per year
1971–2010
18
18
CMOS integrated silicon pressure sensor
Tohru Ishihara, Kenichiro Suzuki, S. Suwazono et al. · IEEE Journal of Solid-State Circuits · 1987 · 73 citations
Electrical Engineering, Engineering, Silicon Pressure Sensor +11
Plasma polymerization of organosilicon compounds
N. Inagaki, Shuji Kondo, M. Hirata et al. · Journal of Applied Polymer Science · 1985 · 71 citations
MOS Integrated silicon pressure sensor
Hiroshi Tanigawa, Tohru Ishihara, M. Hirata et al. · IEEE Transactions on Electron Devices · 1985 · 51 citations
1–5 of 18