Concepedia

András Kovács

AK

Statistics

Publications

9

Citations

334

H-Index

9

Active since

1992

Affiliations

Furtwangen University(Current)

András Kovács is an author at Furtwangen University specializing in materials science, microfabrication, and engineering.

Top concepts

EngineeringMaterial ScienceMicrofabricationApplied PhysicsMechanical Engineering3D PrintingMicrostructureSurface ScienceMicroelectronicsElectronic Packaging

Publications per year

1992–2019

9

Publications

9

LPCVD against PECVD for micromechanical applications

A Stoffel, András Kovács, Wolfgang Kronast et al. · Journal of Micromechanics and Microengineering · 1996 · 146 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +21

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

Péter Fürjes, András Kovács, Cs. Dücso xB et al. · Sensors and Actuators B Chemical · 2003 · 88 citations

Materials Science, Electrical Engineering, Engineering +9

Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications

András Kovács, Ulrich Mescheder · Sensors and Actuators B Chemical · 2012 · 20 citations

Materials Science, Engineering, Nanoporous Material +10

Investigation of humidity adsorption in porous silicon layers

András Kovács, D. Meister, Ulrich Mescheder · physica status solidi (a) · 2009 · 17 citations

Materials Science, Electrical Engineering, Chemical Engineering +12

Process optimization of free-standing polysilicon microstructures

András Kovács, A Stoffel · Journal of Micromechanics and Microengineering · 1992 · 14 citations

Materials Science, Materials Engineering, Engineering +14

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