Wolfgang Kronast

LPCVD against PECVD for micromechanical applications

A Stoffel, András Kovács, Wolfgang Kronast et al. · Journal of Micromechanics and Microengineering · 1996 · 146 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +21

Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap

Wolfgang Kronast, Bernhard Müller, W Siedel et al. · Sensors and Actuators A Physical · 2001 · 66 citations

Single-chip Condenser Microphone, Air Gap, Microfabrication +2

Ultrastable assembly and integration technology for ground- and space-based optical systems

Simon Ressel, Martin Gohlke, Dominik Rauen et al. · Applied Optics · 2010 · 41 citations

Optical Materials, Engineering, Device Integration +25

Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles

P. Walden, Janosch Kneer, Stefan Knobelspies et al. · Journal of Microelectromechanical Systems · 2015 · 41 citations

Engineering, Gas Sensor, Mechanical Engineering +21

Silicon membrane condenser microphone with integrated field-effect transistor

E. Graf, Wolfgang Kronast, S. Dühring et al. · Sensors and Actuators A Physical · 1993 · 28 citations

Engineering, Microfabrication, Silicon Membrane +5