A Stoffel

LPCVD against PECVD for micromechanical applications

A Stoffel, András Kovács, Wolfgang Kronast et al. · Journal of Micromechanics and Microengineering · 1996 · 146 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +21

Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap

Wolfgang Kronast, Bernhard Müller, W Siedel et al. · Sensors and Actuators A Physical · 2001 · 66 citations

Single-chip Condenser Microphone, Air Gap, Microfabrication +2

Tensile strength characterization of low-temperature fusion-bonded silicon wafers

Bernhard Müller, A Stoffel · Journal of Micromechanics and Microengineering · 1991 · 55 citations

Engineering, Silicon Fusion Bonding, Mechanical Engineering +18

Magneto-Optic Properties of MnAs Films

A Stoffel, J. Schneider · Journal of Applied Physics · 1970 · 28 citations

Magnetic Properties, Optical Materials, Engineering +22

Silicon membrane condenser microphone with integrated field-effect transistor

E. Graf, Wolfgang Kronast, S. Dühring et al. · Sensors and Actuators A Physical · 1993 · 28 citations

Engineering, Microfabrication, Silicon Membrane +5