Ulrich Mescheder

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

Péter Fürjes, András Kovács, Cs. Dücso xB et al. · Sensors and Actuators B Chemical · 2003 · 88 citations

Materials Science, Electrical Engineering, Engineering +9

Local laser bonding for low temperature budget

Ulrich Mescheder, M. Alavi, K. Hiltmann et al. · Sensors and Actuators A Physical · 2002 · 63 citations

Materials Science, Photonics, Advanced Laser Processing +7

Properties of SiO₂electret films charged by ion implantation for MEMS-based energy harvesting systems

Ulrich Mescheder, Bernhard Müller, S Baborie et al. · Journal of Micromechanics and Microengineering · 2009 · 45 citations · Full text

Materials Science, Electrical Engineering, Energy Harvesting +14

Ultrastable assembly and integration technology for ground- and space-based optical systems

Simon Ressel, Martin Gohlke, Dominik Rauen et al. · Applied Optics · 2010 · 41 citations

Optical Materials, Engineering, Device Integration +25

Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles

P. Walden, Janosch Kneer, Stefan Knobelspies et al. · Journal of Microelectromechanical Systems · 2015 · 41 citations

Engineering, Gas Sensor, Mechanical Engineering +21