Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application

Technique for monolithic fabrication of microlens arrays

Zoran D. Popović, Robert A. Sprague, G. A. N. Connell · Applied Optics · 1988 · 511 citations

Engineering, Manufacturing Engineering, Materials Science +13

A contribution to the flow behaviour of thin polymer films during hot embossing lithography

Hella‐Christin Scheer, H. Schulz · Microelectronic Engineering · 2001 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +11

Microjet fabrication of microlens arrays

Duncan L. MacFarlane, V. Narayan, W. Royall Cox et al. · IEEE Photonics Technology Letters · 1994 · 183 citations

Engineering, Manufacturing Engineering, Materials Science +10

Polymer deformation and filling modes during microembossing

Harry D. Rowland, William P. King · Journal of Micromechanics and Microengineering · 2004 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +17

General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask

Walter Däschner, Robert J. Stein, Chuck Wu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 63 citations

Engineering, Materials Engineering, Materials Science +17