Publication | Closed Access
Microjet fabrication of microlens arrays
183
Citations
23
References
1994
Year
Optical DesignEngineeringElectron-beam LithographyMicroscopyOptic DesignMechanical EngineeringFull ArrayBiomedical EngineeringMicro-optical ComponentIndividual LensletsMicromachinesMaterials FabricationMicrojet FabricationMicrostructuringOptical SystemsNanolithography MethodMaterials ScienceNanomanufacturingMicro Technology3D PrintingLenslet ArraysMicrofabricationOptical SciencesMicromachining
Microjet, or inkjet, technology is used to fabricate lenslet arrays with packing densities greater than 15000/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . Typical lens diameters range between 70 and 150 μm, and focal lengths are between 50 and 150 μm. Individual lenslets are characterized in the Fraunhofer plane. The full array is characterized in its far field.
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