Deposition of low-resistivity gallium-doped zinc oxide films by low-temperature radio-frequency magnetron sputtering - Concepedia

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Deposition of low-resistivity gallium-doped zinc oxide films by low-temperature radio-frequency magnetron sputtering

41

Citations

29

References

2009

Year

Jiun‐Yi Tseng, Yuan-Tsung Chen, Ming-Yi Yang, Pin-Chou Li, Wang-Chieh Yu, Yung‐Fu Hsu, Sea‐Fue Wang

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsLow-resistivity Gallium-doped ZincApplied PhysicsGallium OxideThin FilmsChemical DepositionThin Film Processing

References

	Year	Citations

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