Concepedia

Biaxial alignment in sputter deposited thin films

Stijn Mahieu, Pieter Ghekiere, Diederik Depla, Roger De Gryse

Thin Solid Films · 2006 · 435 citations · 94 references

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References

94

<i>Fractal Concepts in Surface Growth</i>

Albert-Ĺaszló Barabási, H. Eugene Stanley, Leonard M. Sander · Physics Today · 1995 · 3.3K citations

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Nucleation and growth of thin films

J. A. Venables, G. D. T. Spiller, M. Hanbücken · Reports on Progress in Physics · 1984 · 2.9K citations

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Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

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High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

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Microstructural evolution during film growth

I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations

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