Mechanism of microwave plasma etching of polyimides in O2 and CF4 gas mixtures

Spectrometric identification of organic compounds

Robert M. Silverstein, G. Clayton Bassler · Journal of Chemical Education · 1962 · 14.3K citations

Natural Sciences, Biochemistry, Chemistry +12

Spectrometric identification of organic compounds

Journal of Molecular Structure · 1972 · 2.5K citations

Natural Sciences, Biochemistry, Chemistry +12

Spectroscopic Studies of Poly[N,N'-bis(phenoxyphenyl)pyromellitimide]. 1. Structures of the Polyimide and Three Model Compounds

Hatsuo Ishida, Stephen T. Wellinghoff, Eric Baer et al. · Macromolecules · 1980 · 366 citations

Natural Sciences, Chemistry, Materials Science +12

Plasma etching of organic materials. I. Polyimide in O2–CF4

Frank D. Egitto, F. Emmi, R. S. Horwath et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 132 citations

Natural Sciences, Materials Engineering, Materials Science +17

Decapsulation and Photoresist Stripping in Oxygen Microwave Plasmas

Steven Dzioba, G. Este, H. M. Naguib · Journal of The Electrochemical Society · 1982 · 59 citations

Natural Sciences, Electrical Engineering, Materials Science +8