Concepedia

R. S. Horwath

RS

4

Publications

208

Citations

4

H-Index

1982

Active since

Affiliations

Rochester Institute of Technology(Current)

Endicott College

Systems Technology (United States)

R. S. Horwath is an author at Rochester Institute of Technology specializing in applied physics, engineering, and surface science.

Top concepts

Publications per year

1982–1988

4

Publications

4

Plasma etching of organic materials. I. Polyimide in O2–CF4

Frank D. Egitto, F. Emmi, R. S. Horwath et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 131 citations

, , +13

Plasma etching of organic materials. II. Polyimide etching and passivation downstream of an O2–CF4–Ar microwave plasma

V. Vukanović, G. A. Takacs, Edward Matuszak et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 31 citations

, , +14

Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density

C. B. Zarowin, R. S. Horwath · Journal of The Electrochemical Society · 1982 · 25 citations

, , +18

Stress measurement in sputtered copper films on flexible polyimide substrates

A. Entenberg, V. Lindberg, K. Fletcher et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 21 citations

, , +20

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