Concepedia

Edward Matuszak

EM

1

Publications

31

Citations

1

H-Index

1988

Active since

Affiliations

Systems Technology (United States)(Current)

Edward Matuszak is an author at Systems Technology (United States) specializing in applied physics, microfabrication, and chemical engineering.

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Publications per year

1988–1988

1

Publications

1

Plasma etching of organic materials. II. Polyimide etching and passivation downstream of an O2–CF4–Ar microwave plasma

V. Vukanović, G. A. Takacs, Edward Matuszak et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 31 citations

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