AlN epitaxial growth on off-angle R-plane sapphire substrates by MOCVD

Tomohiko Shibata, Keiichiro Asai, Yukinori Nakamura, Mitsuhiro Tanaka, Kazuyuki Kaigawa, Junko Shibata, Hiroaki Sakai

Journal of Crystal Growth · 2001 · 48 citations · 19 references

Concepts

References

19