Excimer laser modification of thin AlN films

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

Natural Sciences, Chemistry, Materials Science +10

SAW characteristics of AlN films sputtered on silicon substrates

M. Clément, L. Vergara, J. Sangrador et al. · Ultrasonics · 2004 · 98 citations

Engineering, Materials Engineering, Materials Science +16

Microstructure and thermal conductivity of epitaxial AlN thin films

P. K. Kuo, Gregory W. Auner, Zhouling Wu · Thin Solid Films · 1994 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +13

Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications

V. Mortet, A. V. Vasin, Pierre-Yves Jouan et al. · Surface and Coatings Technology · 2003 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +11

Laser-induced microstructural changes and decomposition of aluminum nitride

Siqi Cao, A. J. Pedraza, Lawrence F. Allard · Journal of materials research/Pratt's guide to venture capital sources · 1995 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +11