Concepedia

Publication | Closed Access

Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications

DOI

51

Citations

21

References

2003

Year

V. Mortet, A. V. Vasin, Pierre-Yves Jouan, Omar Elmazria, M.A. Djouadi
Surface and Coatings Technology

References

YearCitations

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