Microsystem Technologies · 2012 · 14 citations · 14 references
EngineeringMaterials EngineeringMaterials ScienceInterface ScienceMechanical Behavior Of MaterialsSemiconductor DevicesFracture MechanicsFracture ToughnessMoisture DamageSemiconductor ReliabilitySilicon MaterialsWafer BondingBonding-induced DefectsCrack PropagationCrack Propagation ModelingSiliconSilicon WafersWafer AdhesionWafer-to-wafer Bonding
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Bonding of silicon wafers for silicon-on-insulator
W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations
Lattice Trapping of Fracture Cracks
Robb Thomson, Chia-Hong Hsieh, Verinder S. Rana · Journal of Applied Physics · 1971 · 388 citations
Low temperature wafer direct bonding
Qin‐Yi Tong, G. Cha, R. Gafiteanu et al. · Journal of Microelectromechanical Systems · 1994 · 193 citations