Microelectronics Journal · 2003 · 12 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceNanotechnologySemiconductor DevicesSemiconductor MaterialsElectron Beam LithographyIii-v SemiconductorsNanostructured Electronic MaterialsSemiconductor Device MaterialsWide Band Gap SemiconductorsWide-bandgap Semiconductor DevicesDry EtchingEtchingNanopillarsPassivationPassivation MechanismsSuperlattice MaterialsSuperlatticesSurface Passivation Layers
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A new semiconductor superlattice
G.A. Sai-Halasz, Raphael Tsu, L. Esaki · Applied Physics Letters · 1977 · 564 citations