S. Grigoropoulos

Electroluminescent device based on silicon nanopillars

A. G. Nassiopoulos, S. Grigoropoulos, D. Papadimitriou · Applied Physics Letters · 1996 · 99 citations

Engineering, Surface Nanotechnology, Silicon On Insulator +20

Sub-micrometre luminescent porous silicon structures using lithographically patterned substrates

A. G. Nassiopoulos, S. Grigoropoulos, Leigh Canham et al. · Thin Solid Films · 1995 · 63 citations · Full text

Materials Science, Engineering, Beam Lithography +5

Visible luminescence from one- and two-dimensional silicon structures produced by conventional lithographic and reactive ion etching techniques

A. G. Nassiopoulos, S. Grigoropoulos, D. Papadimitriou · Applied Physics Letters · 1995 · 55 citations

Anisotropic Silicon Etching, Optical Materials, Engineering +25

Highly anisotropic silicon reactive ion etching for nanofabrication using mixtures of SF6/CHF3 gases

S. Grigoropoulos, Angeliki Tserepi, A. G. Nassiopoulos · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 36 citations

Anisotropic Room-temperature Process, Plasma Gas Phase, Engineering +19

Highly anisotropic room-temperature sub-half-micron Si reactive ion etching using fluorine only containing gases

S. Grigoropoulos, A. G. Nassiopoulos · Microelectronic Engineering · 1995 · 31 citations · Full text

Materials Science, Engineering, Physics +9