Use of a shock tube in investigations of silicon micromachined piezoresistive pressure sensors

Silicon fusion bonding for fabrication of sensors, actuators and microstructures

Philip W. Barth · Sensors and Actuators A Physical · 1990 · 174 citations

Engineering, Materials Engineering, Materials Science +12

Scaling limits in batch-fabricated silicon pressure sensors

Hin-Leung Chau, K.D. Wise · IEEE Transactions on Electron Devices · 1987 · 162 citations

Engineering, Materials Engineering, Materials Science +17

Acoustic sensors

G. M. Sessler · Sensors and Actuators A Physical · 1991 · 78 citations

Non-linear vibration behavior of thin multilayer diaphragms

R. Paneva, D Gotchev · Sensors and Actuators A Physical · 1999 · 51 citations

Engineering, Materials Engineering, Materials Science +14

Dynamic Pressure Metrology

Vern E. Bean · Metrologia · 1994 · 44 citations

Engineering, Electrical Engineering, Mechanical Engineering +17