Non-linear vibration behavior of thin multilayer diaphragms

<i>Shock and Vibration Handbook</i>

Cyril M. Harris, Charles E. Crede, Horace M. Trent · Physics Today · 1962 · 1K citations

Engineering, Aerospace Engineering, Mechanical Engineering +17

Electrostatically driven vacuum-encapsulated polysilicon resonators

H.A.C. Tilmans, R. Legtenberg · Sensors and Actuators A Physical · 1994 · 409 citations · Full text

Engineering, Electrical Engineering, Materials Science +12

Silicon pressure sensor integrates resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 134 citations

Engineering, Materials Science, Mechanical Engineering +12