Concepedia

Industrial applications of laser micromachining

Optics Express · 2000 · 239 citations · 5 references

Open access

Abstract

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.

References

5

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Natural Sciences, Materials Engineering, Materials Science +14

Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser

Yoshiyuki Kawamura, K. Toyoda, S. Namba · Applied Physics Letters · 1982 · 304 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

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A. Bruno Frazier, R. O. Warrington, C. R. Friedrich · IEEE Transactions on Industrial Electronics · 1995 · 129 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

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Christopher G. Rowan · Laser focus world · 1995 · 15 citations

Engineering, Materials Engineering, Materials Science +12

Laser Drilling of Printed Circuit Boards

M N Watson · Circuit World · 1984 · 10 citations

Engineering, Manufacturing Engineering, Materials Science +11