IEEE Transactions on Industrial Electronics · 1995 · 129 citations · 11 references
EngineeringManufacturing EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationBulk MicromachiningMems DesignMems FabricationMicrofabrication ProcessesMicromachiningSurface MicromachiningDevice MiniaturizationLaser MicromachiningLiga ProcessMicroelectromechanical System FabricationMicromachining Of Silicon WafersMiniaturizationSilicon MicromachiningSilicon Microstructures
Microelectromechanical systems (MEMS), micro systems technologies (MST, primarily in Europe) and micromanufacturing have become synonymous with the design, development, and manufacture of very small devices and systems. This paper overviews the history of the major technologies that are utilized in this field. After this brief historical overview of the technologies, a short description of MEMS technologies is presented. The status of the MEMS effort worldwide is reviewed with emphasis on the United States, Japan, and the European Community with particular emphasis placed on Germany, the Netherlands, and Switzerland. The future for the technology along with technology transfer and management is discussed from the standpoint of market pull. Bulk and surface micromachining of silicon, X-ray micromachining using the LIGA process, and the complementary processes such as laser and focused ion beam micromachining are reviewed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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H.C. Nathanson, W.E. Newell, R.A. Wickstrom et al. · IEEE Transactions on Electron Devices · 1967 · 1.1K citations