Ultra-low energy SIMS analysis of boron deltas in silicon

Secondary Ion Mass Spectrometry

Analytica Chimica Acta · 1993 · 1.1K citations

Natural Sciences, Chemistry, Materials Science +16

Secondary Ion Mass Spectrometry SIMS XI

Greg Gillen, R. T. Lareau, J. Bennett et al. · 2003 · 130 citations

Natural Sciences, Chemistry, Analytical Chemistry +6

Ultra shallow doping profiling with SIMS

P. C. Zalm · Reports on Progress in Physics · 1995 · 123 citations

Natural Sciences, Materials Engineering, Materials Science +17

An analytic form for the SIMS response function measured from ultra‐thin impurity layers

M. G. Dowsett, G. Rowlands, P. N. Allen et al. · Surface and Interface Analysis · 1994 · 103 citations

Engineering, Materials Engineering, Materials Science +17

SiGe growth kinetics and doping in reduced pressure-chemical vapor deposition

Jean‐Michel Hartmann, V. Loup, G. Rolland et al. · Journal of Crystal Growth · 2002 · 95 citations

Engineering, Materials Engineering, Materials Science +14