Memory characteristics of Co nanocrystal memory device with HfO2 as blocking oxide

Abstract

In this letter, the Co nanocrystals using SiO2 and HfO2 as the tunneling and the control dielectric with memory effect has been fabricated. A significant memory effect was observed through the electrical measurements. Under the low voltage operation of 5V, the memory window was estimated to ∼1V. The retention characteristics were tested to be robust. Also, the endurance of the memory device was not degraded up to 106 write/erase cycles. The processing of the structure is compatible with the current manufacturing technology of semiconductor industry.