Concepedia

Techniques to study the reliability of metal RF MEMS capacitive switches

Ingrid De Wolf, W. Merlijn van Spengen

Microelectronics Reliability · 2002 · 66 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceMetallic MaterialsMicroelectromechanical SystemsMicroelectronicsDevice ReliabilityMems FabricationMems MaterialsMems ReliabilityMems SwitchesRf MemsCapacitive Mems SwitchesCapacitive Rf Mems SwitchesRf Mems Reliability