Concepedia

Partial agglomeration during Co silicide film formation

Zhiguang Xiao, G. A. Rozgonyi, C. A. Canovai, C. M. Osburn

Journal of materials research/Pratt's guide to venture capital sources · 1992 · 31 citations · 9 references

DOI

Concepts

References

9

Formation of thin films of CoSi2: Nucleation and diffusion mechanisms

F. M. d’Heurle, C. S. Petersson · Thin Solid Films · 1985 · 211 citations

, , +14

A transmission electron microscopy study of low-temperature reaction at the Co-Si interface

P. Ruterana, Ph. Houdy, Pierre Boher · Journal of Applied Physics · 1990 · 146 citations

, , +17

Interactions in the Co/Si thin-film system. II. Diffusion-marker experiments

G. J. van Gurp, W. F. van der Weg, D. Sigurd · Journal of Applied Physics · 1978 · 125 citations

, , +17

Cobalt silicide layers on Si. I. Structure and growth

G. J. van Gurp, Cor G. Langereis · Journal of Applied Physics · 1975 · 124 citations

, , +17

Evolution of thin-film and surface microstructure

Carl V. Thompson, J. Y. Tsao, David J. Srolovitz · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1991 · 103 citations

, , +17