Statistics
Publications
6
Citations
264
H-Index
6
Active since
1990
Affiliations
C. A. Canovai is an author at North Carolina State University specializing in materials science, semiconductor devices, and semiconductor materials.
Publications per year
1990–1993
6
6
Incorporation of metal silicides and refractory metals in VLSI technology
C. M. Osburn, Q.F. Wang, M. Kellam et al. · Applied Surface Science · 1991 · 65 citations
Agglomeration of Cobalt Silicide Films
Z. G. Xiao, G. A. Rozgonyi, C. A. Canovai et al. · MRS Proceedings · 1990 · 52 citations
Natural Sciences, Materials Engineering, Materials Science +10
Thermal Stability of Thin Submicrometer Lines of CoSi2
Q. F. Wang, C. M. Osburn, P. L. Smith et al. · Journal of The Electrochemical Society · 1993 · 43 citations
1–5 of 6