Concepedia

Publication | Closed Access

Incorporation of metal silicides and refractory metals in VLSI technology

DOI

65

Citations

41

References

1991

Year

C. M. Osburn, Q.F. Wang, M. Kellam, C. A. Canovai, P. L. Smith, G. E. McGuire, Zhiguang Xiao, G. A. Rozgonyi
Applied Surface Science

References

YearCitations

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